【摘要】 以微机电系统（MEMS）微镜为核心的激光雷达具有高分辨率、小型化、低成本的优点，但存在着扫描角度小，全景系统构建困难等问题。为此，提出了一种新颖的片上全硅集成的360°激光雷达束搅系统。在锥镜顶部设计了柔性梁，形成多维度扭转中心，在锥镜底部设计了MEMS梳齿驱动器驱动的面内扭转及二维扫描联合牵引机构，构建了以锥镜顶部为旋转中心，以底部牵引机构为驱动的360°环带空间动态光束搅系统。采用Coventor有限元软件分析了束搅系统的运动特性。结果表明，四棱锥镜的单个镜面在50 V的驱动电压下，能够获得±29.32°的面内扭角和±1.8°的离面扭角，形成覆盖360°的环形扫描视场和3.6°的纵向视场。所设计的系统解决了目前MEMS激光雷达视场角较小的问题，实现了全景图像采集。该研究为自动驾驶提供了全景激光雷达的理论模型。更多还原

【Abstract】 Light detection and ranging(LiDAR) with micro-electromechanical system(MEMS) micromirrors at the core has the advantages of high resolution, miniaturization, and low price. However, problems still exist, including a small scanning angle and difficult construction of panoramic systems. Therefore, a novel on-chip all-silicon integrated 360° laser radar beam-mixing system is proposed in this study. A flexible beam was designed on top of the conical mirror to form a multidimensional torsion center. A combined traction mechanism of in-plane torsion and two-dimensional scanning driven by a MEMS comb driver was designed at the bottom of the conical mirror. A 360° annular space dynamic beam-mixing system was constructed with the top of the conical mirror as the rotation center and the bottom traction mechanism as the driving force. The kinematic characteristics of the beam-mixing system were analyzed by Coventor finite element software.Results show that under the driving voltage of 50 V, a single quadrangular mirror can obtain in-plane and out-of-plane twist angles of ±29. 32° and ±1. 8°, respectively, and form circular scanning and longitudinal fields of view covering 360° and 3. 6°, respectively. The designed system solves the problem of the small field of view of MEMS LiDAR and realizes panoramic image acquisition. This research has provided a theoretical model of panoramic LiDAR for automatic driving.更多还原