【摘要】 根据空心阴极原理，研究了离子氮化对高速钢表面渗氮层的厚度、硬度等影响.在此基础上，研究了气体体积配比对渗氮后高速钢表面沉积的类金刚石膜的结合力、sp³键含量和耐磨性能的影响.研究结果表明：离子氮化后，高速钢表面镀膜结合力明显提高，由10.35 N提高至18.56 N;降低气体体积配比中CH₄的含量有利于提高膜层中sp³键的含量，高速钢耐磨性能明显提升，摩擦系数由0.175降至0.1.离子氮化可有效提高高速钢表面沉积的类金刚石膜性能.更多还原

【Abstract】 Based on the principle of hollow cathode, the influence of ion nitriding on the thickness and hardness of nitriding layer on the surface of high-speed steel was studied. On this basis, the effects of gas component on the binding force, sp³ bond content and wear resistance of diamond-like film deposited on the surface of high-speed steel after nitriding were discussed. The results show that after ion nitriding, the surface coating bonding force of high-speed steel surface coating is significantly improved from 10.35 N to 18.56 N. Reducing the fraction of CH₄ in the gas mixture is conducive to increasing the content of sp³ bond in the film layer, and the wear resistance is significantly improved, whose friction coefficient is reduced from 0.175 to 0.1. Ion nitriding can effectively improve the properties of diamond-like film deposited on the surface of high-speed steel.更多还原