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基于离子膜的高灵敏电容式柔性压力传感器

High sensitivity capacitive flexible pressure sensor based on ionic membrane

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【作者】 刘平汪晓佳刘彩霞田合雷徐宝华张恩灿

【Author】 LIU Ping;WANG Xiaojia;LIU Caixia;TIAN Helei;XU Baohua;ZHANG Encan;School of Microelectronics, Hefei University of Technology;Chuzhou Power Supply Company, State Grid Anhui Electric Power Co., Ltd.;

【通讯作者】 刘平;

【机构】 合肥工业大学微电子学院国网安徽省电力有限公司滁州供电公司

【摘要】 针对精确测量微小人体生理信号的需求,文章采用聚乙烯醇、氢氧化钾为材料,结合砂纸倒模技术,制作一种具有微结构复合离子膜介电层的高灵敏柔性电容式压力传感器。详细阐述传感器制作流程,表征离子膜的化学特性,分析并优化介电层材料配比及微结构尺寸,在对传感器静态和动态特性进行测试后将之应用于人指尖脉搏波测量。结果表明,基于离子膜微结构介电层的柔性电容式传感器具有高灵敏度(8.29 kPa-1)和快速响应时间(45 ms),将该传感器安装到手指夹具中,通过脉搏波测量系统即可实现对人指尖脉搏的精确测量。该研究为可穿戴医疗电子设备提供了一种新的选择。

【Abstract】 In order to meet the needs of precise measurement of subtle human physiological signals, by adopting polyvinyl alcohol and potassium hydroxide as the materials, and combined with sandpaper reverse mold technology, this paper produces a kind of high sensitivity flexible capacitive pressure sensor with microstructured composite ionic membrane dielectric layer. The production process of the sensor is described, the chemical characteristics of the ionic membrane are characterized, and the dielectric layer material ratio and microstructure size are analyzed and optimized. Then, the static and dynamic characteristics of the sensor are tested, and the sensor is applied to the human fingertip pulse wave measurement. The results show that the sensor has high sensitivity(8.29 kPa-1) and fast response time(45 ms). The sensor is installed in the finger clamp, and the pulse wave measurement system realizes the accurate measurement of the human fingertip pulse, which provides a new choice for the wearable medical electronic devices.

【基金】 浙江省科学技术厅领雁资助项目(2022C03052;2024C01150);安徽省教育厅协同创新资助项目(GXXT-2023-075);中央高校基本科研业务费专项资金资助项目(JZ2020HGTB0027);合肥工业大学大学生创新创业训练计划资助项目(S202210359267);国家电网有限公司科技资助项目(B312M023000R)
  • 【文献出处】 合肥工业大学学报(自然科学版) ,Journal of Hefei University of Technology(Natural Science) , 编辑部邮箱 ,2024年09期
  • 【分类号】TP212
  • 【下载频次】98
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