【摘要】 触针表面形貌测量系统具有高精度、高分辨率、稳定可靠和动态特性好等优点，在生产和科研中发挥着重要作用。但其杠杆结构造成的非线性误差，在大量程测量时会显著增大误差，影响测量精度。本文基于粒子自身的亲和力和浓度选择交叉变异提出一种新型粒子群算法，显著提高了粒子群算法的迭代速度和收敛精度。基于此粒子群算法可实现对触针表面形貌测量系统的非线性误差补偿，有效避免局部收敛，提高了补偿精度。经实验验证，通过高精度标准球冠进行标定测量，补偿误差在±0.5μm以内。更多还原

【Abstract】 The stylus surface topography measurement system plays an important role in production and scientific research because of its high precision, resolution, stability, reliability and good dynamic characteristics.However, the nonlinear error caused by its lever structure significantly increases the error in large range measurement, affecting the measurement accuracy.In this paper, a new particle swarm optimization algorithm is proposed.Particles decides to cross and mutate based on their affinity and concentration, which significantly improves the iteration speed and convergence accuracy of the algorithm.And through the measurement and calibration of high-precision standard spherical crown, the experimental verification shows that the compensation error is within ±0.5μm.更多还原