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高分子化学“聚合物的化学反应”项目式教学:芯片制造中的关键材料——光刻胶

Project-Based Learning of “Chemical Reaction of Polymers” in Polymer Chemistry Course: Photoresist for Chip Manufacturing

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【作者】 林海慧钟鸣陈水亮

【Author】 LIN Hai-Hui;ZHONG Ming;CHEN Shui-Liang;College of Chemistry and Chemical Engineering, Jiangxi Normal University;

【通讯作者】 钟鸣;陈水亮;

【机构】 江西师范大学化学化工学院

【摘要】 以“芯片制造中的关键材料——光刻胶”为项目式教学主题,开展大学高分子化学中“聚合物的化学反应”的教学。从芯片的制造引入,通过学习光刻胶中感光树脂的合成方法了解高分子的基团反应特点以及功能高分子材料的合成策略;再通过光刻胶的光刻反应学习聚合物的交联和降解反应原理,进一步理解聚合物的化学反应实质;最后通过光刻胶在芯片制造中的应用实例,了解聚合物化学反应在实际生产的应用和实施方式。将科技前沿和实际生产相关知识与课堂教学相融合,培养学生的科学探究精神和创新意识。

【Abstract】 Taking “photoresist, the key material for chip manufacturing” as the project-based learning theme, this paper carries out the learning design of “chemical reaction of polymers” in the undergraduate course of polymer chemistry. The learning design is started from the introduction of chip manufacture and understand the group reaction characteristics of polymers and the synthesis strategy of functional polymer materials by learning the synthesis method of photoresist resin; Then, by studying the photolithographic reaction of photoresist, we can learn the principle of crosslinking and degradation reaction of polymer, and further understand the essence of chemical reaction of polymer; Finally, understand the application and implementation of polymer chemical reaction in actual production through the application of photoresist for chip manufacturing. This learning design will integrate the cutting-edge knowledge of science and technology and practical production with classroom teaching to cultivate students’ spirit of scientific inquiry and innovative consciousness.

【基金】 江西省高等学校教学改革研究省级课题(JXJG-22-2-30);江西师范大学“基于项目式教学改革的教学研究团队”重点建设项目
  • 【文献出处】 化学教育(中英文) ,Chinese Journal of Chemical Education , 编辑部邮箱 ,2024年24期
  • 【分类号】O631.3-4;G642.4
  • 【下载频次】499
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