【摘要】 金刚石优异的材料特性使其在日盲紫外探测领域有很大的应用潜力。本文采用微波等离子体化学气相沉积设备在（111）晶面单晶硅衬底上沉积金刚石薄膜，并基于该薄膜采用光刻胶热解法制备石墨材料平面叉指电极MSM结构金刚石日盲紫外探测器，为全碳金刚石探测器的实现提供了新方法。结果表明，该硅基金刚石薄膜为高取向多晶薄膜，（111）晶面的XRD 2θ扫描半峰宽为0.093°，拉曼光谱金刚石特征峰峰位1 332cm^-1，半峰宽为4 cm^-1，薄膜晶体质量较高；石墨电极紫外探测器在5 V偏置电压下的暗电流为2.07×10^-8 A，光暗电流比为77，开关特性良好，并且石墨电极探测器具有优异的时间响应，上升时间为30 ms，下降时间为430ms。更多还原

【Abstract】 The excellent properties of diamond make it a great application potential in the field of solar blind ultraviolet detection. In this paper, heteroepitaxial diamond films were grown on（111） monocrystalline Si substrates by microwave plasma chemical vapor deposition（MPCVD） and the metal-semiconductor-metal（MSM） structure diamond solar blind UV detectors with planar interdigital graphite electrode prepared by pyrolytic photoresist method were produced. The results show that the heteroepitaxial diamond film on silicon substrate is the highly oriented polycrystalline film. The X-ray diffraction peak of the（111） diamond is 43. 9°, and the full width at half maximum（FWHM） is 0. 093°, while the Raman scattering peak of diamond is 1 332 cm^-1 and the FWHM is 4 cm^-1, indicating high crystal quality of the heteroepitaxial polycrystalline diamond film. The graphite electrodes were characterized by the optical microscopy and Raman spectroscopy. It shows that compared with the laser ablation method, the pyrolytic photoresist method simplifies the processes and reduces the cost. It is an effective method for preparing graphite electrodes on diamond films. The dark current of the detector with the graphite electrode reaches 2. 07×10^-8 A at 5 V bias, and the light-to-dark current ratio reaches 77 at 5 V bias. The diamond detector with the graphite electrode has excellent time response performance. The rising time is 30 ms and the falling time is 430 ms. Therefore, the diamond solar blind UV detector with the graphite electrode prepared by pyrolytic photoresist has high performance.更多还原