【摘要】 研究了粉末原子层沉积技术（ALD）在白光LED用K₂SiF₆∶Mn⁴⁺（KSFM）红色荧光粉包覆和表面改性中的应用，以及对其结构特性、发光性能和湿热环境中稳定性的影响。结果表明，采用ALD技术以三甲基铝作为前驱体、臭氧作为氧化剂，可以在KSFM表面形成氧化铝包覆层。X射线衍射、表面形貌分析表明，ALD处理过程不会影响KSFM荧光粉的晶相和形貌特征。发光光谱分析表明，由于氧化铝钝化特性还会增强KSFM荧光粉的发光强度，并且不改变其发光波长。相较于未经包覆的KSFM荧光粉，包覆层可以显著改善KSFM粉末的湿热环境稳定性，ALD包覆后样品的相对发光强度在85%湿度/85℃环境中老化处理24 h后仍能保持初始值的84%。更多还原

【Abstract】 This study explores the use of atomic layer deposition（ALD） technology for encapsulating and modifying the surface of K₂SiF₆∶Mn⁴⁺（KSFM） red phosphors for white light emitting diodes（LEDs）,and its impact on the structural properties,luminescent characteristics,and stability in a humid and hot environment.The findings reveal that by employing ALD technology with trimethylaluminum as the precursor and ozone as the oxidant,an alumina coating can be formed on the surface of KSFM.Xray diffraction and surface morphology analyses indicate that the ALD treatment process does not affect the crystal phase and morphology of the KSFM phosphors.Moreover,luminescence spectroscopy analysis demonstrates that the alumina coating,owing to its passivation properties,can enhance the luminescent intensity of KSFM phosphors without altering their emission wavelength.Furthermore,compared to uncoated KSFM phosphors,the coating layer can significantly enhance the dampheat stability of KSFM powders.Following a 24hour aging treatment in an 85%humidity/85℃environment,samples coated with ALD maintain 84%of their initial luminescent intensity.更多还原