【摘要】 为准确获取谐振器材料参数，采用开路短路法、集总参数法、传输线法三种方法分别对谐振器进行去嵌，并分析去嵌对滤波器产生的影响。其中传输线法去嵌无需流片，仿真即可得出谐振器测试结构的寄生参数。采用传输线法对串联、并联谐振去嵌，并运用去嵌后的谐振器材料参数搭建滤波器，滤波器采用九阶π型电路拓扑结构，其带宽为160 MHz,阻带抑制为-25 dB。证实谐振器的测试结构对宽带声表面波滤波器带宽、阻带和零点造成影响，使得去嵌后的滤波器左侧零点向低频偏移，低频抑制上升，高频抑制下降，通带插入损耗增加。更多还原

【Abstract】 Various methods were used to de-embed the resonator and analyze the effect of de-embedding on the filter to obtain accurate material parameters of the resonator. Three methods were used to de-embed the resonator, namely, the open-circuit short-circuit method, the lumped-parameter method, and the transmission line method. Among them, the transmission line method does not require tapeout, and parasitic parameters of the resonator can be derived from simulation. The series and shunt resonators were de-embedded by the transmission line method, and the filter was constructed by using the material parameters of the de-embedded resonator. The filter adopts a ninth-order π-circuit topology with a bandwidth of 160 MHz and a rejection of-25 dB. It is demonstrated that the test structure of the resonator could affect the bandwidth, the stopband, and the zero point of the broadband SAW filter. After de-embedding, the zero point of the left side of the de-embedded filter shifts towards lower frequency, and the low-frequency rejection increases, and the high-frequency rejection decreases, and the passband insertion loss increases.更多还原