【摘要】 硅MEMS陀螺具有体积小、成本低等优点，被广泛应用于各个领域。然而受加工工艺及环境因素的限制，实际生产的陀螺存在模态失配问题，影响了陀螺的整体性能。针对制造缺陷引起的硅MEMS陀螺性能缺陷，模态匹配技术是解决模态失配、提高陀螺机械灵敏度和信噪比的重要技术手段。首先，阐述了硅MEMS陀螺的基本工作原理及模态匹配的优势；然后，总结了频率修调的主要方式，包括刚度修调与质量修调两大类，其中静电修调的应用最为广泛；最后，对国内外模态匹配的发展现状进行了调研与归类分析，关键问题在于确定模态匹配的判定标准并给出模态频率控制量，实时自动模态匹配由于能够改善频差的温度漂移、提高陀螺稳定性等特点具有很大的研究价值。更多还原

【Abstract】 Silicon MEMS gyroscopes have the advantages of small size and low cost, and are widely used in various fields. However, due to limitations in processing technology and environmental factors, the actual generated gyroscopes have the problem of mode mismatch, which affects the overall performance of the gyroscopes. To address the performance defects of silicon MEMS gyroscope caused by manufacturing defects, modal matching technology is an essential technical means to resolve modal mismatch, and improve the mechanical sensitivity and signal-to-noise ratio. Firstly, the basic working principle of silicon MEMS gyroscopes and the advantages of modal matching are described. Then, the main methods of frequency tuning are summarized, including stiffness tuning and mass tuning, among which electrostatic tuning is the most widely used. Finally, the development status of modal matching is investigated and classified. The key problem is to determine the criterion of modal matching and providing the modal frequency control quantity. Moreover, the technology of real-time automatic modal matching has great research value because of it can improve the temperature drift of frequency difference and enhance the stability of gyroscope.更多还原