【摘要】 为改善真空镀膜设备多电机协同控制系统的稳定性与协同性，将自抗扰控制应用于电机调速控制系统，并与传统PI控制进行对比分析，验证了其较强的抗干扰能力。基于自抗扰控制，针对外界扰动下多台电机间转速同步误差较大问题，提出一种改进型偏差耦合控制的速度补偿器，其与传统方式相比，多电机间同步误差减小39.22%,恢复时间缩短75%,真空镀膜设备张力波动降低57.78%。更多还原

【Abstract】 In order to improve the stability and synergism of multi-motor cooperative control system for vacuum coating apparatus, this paper applies ADRC to the motor speed control system, and carries out a comparative analysis with the conventional PI control, and verifies that the ADRC has a strong disturbance-tolerant ability. Based on the ADRC, in view of large synchronization error among multiple motors speed under external disturbances, this paper puts forward an improved deviation coupling control speed compensator, which can achieve 39.22%, 75%, and 57.78% reduction in synchronization error among multiple motors, recovery time, and vacuum coating tension fluctuation, respectively, compared with conventional speed compensation.更多还原