【摘要】 针对非晶态氧化铝纳米薄膜材料性能预测难度较大的问题，本文提出一种基于光谱椭偏技术的不同色散模型对比分析方法，用于测算纳米薄膜的结构和光电特性。通过建立Tauc-Lorentz和Forouhi-Bloomer色散模型，系统地研究了原子层沉积技术制备的氧化铝薄膜的物相结构、微观形貌和光电特性。结果表明，该薄膜具有无定型结构，表面光滑无裂纹。不同模型获得的结构参数及光电常数并不一致，Forouhi-Bloomer模型得到薄膜厚度与扫描电子显微镜测量的结果更接近，而Tauc-Lorentz模型的粗糙度更符合原子力显微镜测试结果。Tauc-Lorentz模型提取的带隙结果与Tauc法外推出的禁带宽度均保持在3 eV左右。根据分析发现，结构参数的差异主要是由于模型间数学处理方式和参数描述差异导致的，光电参数的不同主要源于模型推导过程中假设条件和收敛特性的差异。更多还原

【Abstract】 It is difficult to predict the properties of amorphous aluminum oxide nano-film. In this work, a comparative analysis method of different dispersion models based on spectroscopic ellipsometry is proposed, which can be used to calculate the structure and the optoelectronic parameters in nano-film. The phase structure, micromorphology and photoelectric properties of films prepared by atomic layer deposition are systematically investigated using the Tauc-Lorentz and the Forouhi-Bloomer dispersion models. The results show that the film has an amorphous structure and a smooth surface without cracks. The structural parameters and photoelectric constants obtained by different models are not consistent with each other. The thickness of the film obtained using Forouhi-Bloomer model is closer to the results measured by scanning electron microscope, and the roughness of the film obtained by Tauc-Lorentz model is more consistent with the results of atomic force microscopy. The band gap result extracted by the Tauc-Lorentz model and the bandgap width derived from the Tauc method are both kept at about 3 eV. According to the analysis, the differences of structural parameters are mainly caused by the differences in mathematical processing methods and model parameter descriptions of different models.更多还原