【摘要】 微光栅加速度计凭借着极高灵敏度和分辨率等优势成为近几年的研究热点，但外界环境温度的变化会影响其输出精度。为优化其温度特性，提出了一种两级内外温控系统。通过介绍微光栅加速度计的基本原理，分析了由于半导体激光器和MEMS敏感芯片的温度特性对其造成的影响。针对加速度计设计了温控电路，对其搭载两级内外温控系统，使其工作温度保持恒定，最后对该系统进行了实验测试。实验结果表明：在该温控系统下，加速度计的工作温度控制精度可达±0.02℃。对于加速度计的噪声性能而言，在0.01～10 Hz频段，相较于未加温控系统的加速度计，整体信噪比提高了20 dB。更多还原

【Abstract】 Micro-grating accelerometers have become a research hotspot in recent years due to their advantages of extremely high sensitivity and resolution. But the change of ambient temperature will affect their output accuracy. In order to address the issue of temperature drift in micro-grating accelerometers, a two-stage internal and external temperature control system was proposed.By introducing the basic principle of micro-grating accelerometer, the influence of temperature characteristic of semiconductor laser and MEMS chip on micro-grating accelerometer was analyzed. A temperature control circuit was designed for the accelerometer, which was equipped with a two-stage internal and external temperature control system to maintain a consistent operating temperature. Finally, the system was tested experimentally. Experimental results show that the operating temperature control accuracy of the accelerometer can reach ±0.02 ℃ under the temperature control system. For the noise performance of the accelerometer, in the frequency band of 0.01～10 Hz, compared with the accelerometer without temperature control system, the overall signal-to-noise ratio is improved by 20 dB.更多还原