【摘要】 因光学式触觉传感器有着灵敏度高、抗干扰能力强等优点，提出了一种基于亚波长金属光栅干涉的触觉传感器。首先，基于等效介质理论和薄膜干涉理论对触觉传感器的传感原理进行介绍；接着，通过纳米压印工艺和真空蒸发镀膜工艺在柔性中间聚合物片材(IPS)表面制作亚波长金属光栅，通过光刻工艺用SU—8光刻胶将亚波长金属光栅以固定间距平行离面放置，使其透射光强随接触力的施加而改变；最后，对光栅触觉传感器进行一系列力加载实验，实验结果表明：该触觉传感器的平均力分辨率可达到0.000 3 N/Gray以上，平均测量误差为6.3%。通过小型化设计，可以用于机械手上实现触觉传感功能。更多还原

【Abstract】 A tactile sensor based on subwavelength metal grating interference is proposed because optical tactile sensors have the advantages of high sensitivity and strong interference resistance ablilty.Firstly, the sensing principle of the tactile sensor is introduced based on the equivalent medium theory and thin film interference theory.Then, subwavelength metal grating is fabricated on the surface of flexible intermediate polymer sheet(IPS)by nanoimprinting lithography process and vacuum evaporation coating process.The subwavelength metal grating is placed off-surface at a fixed pitch parallel to the grating by photolithography process with SU—8 photoresist, so that its transmitted light intensity changes with the application of contact force.Finally, a series of force loading experiments are conducted on the grating tactile sensor, and the experimental results show that the average force resolution of the tactile sensor can reach more than 0.000 3 N/Gray, and the average measurement error is 6.3 %.This tactile sensor may be used to realize the tactile sensing function on the manipulator by miniaturization design.更多还原