【摘要】 针对在日常生活使用广泛但危害性极大的甲醛溶液，基于光学微环谐振器，设计了一种灵敏度高、动态范围大的折射率传感器，用来检测甲醛溶液浓度。本文利用波导微扰理论，确定了使系统灵敏度最大化的波导核心尺寸，利用有限元进行模拟计算。结果发现：利用该传感器如果检测到10^-5的相对波长位移，那么就可以检测到10^-4的相对折射率变化，并且通过包层去除方法还可进一步提升该传感器的灵敏度，与其他方法相比，这种甲醛溶液探测传感器的灵敏度有了很大程度的提升，对实际甲醛溶液的测量有着实际指导意义。更多还原

【Abstract】 Aiming at the problem of extremely harmful of widely used formaldehyde solution in daily life, a refractive index sensor with high sensitivity and large dynamic range is designd to detect the concentration of formaldehyde solution based on optical microring resonator.Using the waveguide perturbation theory, the waveguide core size that maximizes the sensitivity of the system is determined, simulation calculations are performed using finite elements.It is found that if the relative wavelength shift of 10^-5 is detected, the relative refractive index change of 10^-4 can be detected, the sensitivity of the sensor can be further improved by the coating removal method.Compared with other methods, the sensitivity of this sensor for detecting formaldehyde solution is greatly improved,which has practical guiding significance for the actual measurement of formaldehyde solution.更多还原