【摘要】 采用直流反应溅射技术在Ti6Al4V钛合金表面制备了不同氮气流量的氮化钛涂层，通过场发射扫描电子显微镜、X射线衍射仪、X射线光电子能谱仪、划痕仪和电化学工作站对涂层进行测试，研究了氮气流量对涂层微观结构与性能的影响。结果表明：当氮气流量为0.3 mL/min时，涂层呈非晶结构；氮气流量为0.5～3.5 mL/min时，涂层中存在氮氧化钛晶相。随着氮气流量的增大，涂层中的N元素含量减少，O元素含量增加，涂层的厚度减小，致密性、耐蚀性和界面结合增强。更多还原

【Abstract】 Titanium nitride coatings were prepared on Ti6Al4V titanium alloy via DC reactive sputtering technology at different nitrogen flow rates.The coating was characterized by scanning electron microscope (SEM),X-ray diffractometer (XRD),X-ray photoelectron spectroscopy (XPS),scratch tester,and electrochemical workstation to investigate the influence of nitrogen flow rate on the coating’s microstructure and properties.Results indicate?that at 0.3 mL/min nitrogen flow rate,the coating exhibits an amorphous structure,while at 0.5～3.5 mL/min,there is a titanium nitrogen oxide crystal phase.As the nitrogen flow rate increases,the N element content in the coating decreases,the O element content increases,the coating thickness decreases,and the density,interface bonding,and corrosion resistance are enhanced.更多还原