【摘要】 真空度传感器是真空检测的核心元件。基于全桥结构微电子机械系统（MEMS）皮拉尼芯片开发了一款高精度宽量程MEMS皮拉尼真空度传感器。全桥结构的设计从芯片级有效抑制了传感器的温漂。测试结果表明，传感器最大温漂为0.15%/℃。校准后，该传感器能够在5×10^-2～1.01×10⁵ Pa的真空度范围内实现小于5%的高读数精度，最大灵敏度为1.34 V/Dec。传感器平均噪声小于-100 dB,理论计算最小检测极限为1.9×10^-3 Pa。该真空度传感器具有宽量程和高检测精度的特点，能够满足不同领域的真空检测需求。更多还原

【Abstract】 Vacuum sensor is the core component for vacuum detection. A high-accuracy wide-range microelectromechanical system（MEMS） Pirani vacuum sensor was developed based on a full-bridge structure MEMS Pirani chip. The temperature drift of the sensor is effectively suppressed from the chip level via the design of the full-bridge structure. Measurement results show that the maximum temperature drift of the sensor is 0.15%/℃. After calibration, the sensor is able to achieve a high reading accuracy of less than 5% in a vacuum range of 5×10^-2-1.01×10⁵ Pa, and with a maximum sensitivity of 1.34 V/Dec. The average sensor noise is less than-100 dB, and the theoretically calculated minimum detection limit is 1.9×10^-3 Pa. The reported vacuum sensor features wide-range and high detection accuracy, which can meet the vacuum detection needs in different fields.更多还原