【摘要】 根据天线辐射理论和超材料特性，通过HFSS仿真软件，对基于方形开口谐振环(SRR)的无线激励2.45 GHz微波微等离子体阵列源进行研究。仿真结果表明，SRR的长度、宽度和缝隙宽度、辐射天线与阵列源的距离、偏移距离和谐振环开口方向等参数对微波微等离子体阵列源的S参数、电磁场分布等有较大影响。更多还原

【Abstract】 According to the theory of antenna radiation and the characteristics of meta-material, a wireless exciting microwave micro-plasma array source based on square split resonant ring(SRR) at 2.45 GHz is studied by using HFSS simulation software. The simulation results show that the length, width and gap width of the square SRR, the space and central deviation between the radiation antenna and the array, and the gap orientation of the square SRR have significant effects on the S-parameters, electromagnetic field distribution of the wireless exciting microwave micro-plasma array source.更多还原