【摘要】 发光波长为940 nm的垂直腔面发射激光器(VCSEL),具有效率高、可避免红爆、易于集成等特点，在消费电子、视觉成像、3D传感等领域具有广阔的应用前景。然而，工作环境温度的变化，会影响VCSEL的光电性能。为了实现光电系统的宽温区工作，有必要研究VCSEL的光电特性随温度、工作电流的变化规律。本文针对单颗VCSEL芯片、24颗芯片并联阵列、多芯片集成并联阵列等3种典型的940 nm VCSEL,进行了变温电致发光特性研究。研究结果表明，芯片串联电阻随温度的变化而变化，对VCSEL的电特性产生重要影响，VCSEL发光波长的漂移与自发热效应有着重要联系。更多还原

【Abstract】 Vertical-Cavity Surface-Emitting Laser(VCSEL) devices with emission wavelength at 940 nm feature the advantages of high efficiency, avoidance of red-bursts, and easy integration, possessing a broad application prospect in consumer electronics, visual imaging, 3D sensing, among others.However, the variation on temperature in the operating condition affect the optoelectronic performance of VCSEL.In order to realize the wide-temperature-region operation of optoelectronic system, it is necessary to investigate the variation of optical-electrical characteristics of the VCSEL with temperature and operating current.The electroluminescence characteristics research was carried out for three typical 940 nm VCSELs.The results show that the series resistance varies with temperature, posing an important impact on the electrical characteristics of VCSEL,and the drift of wavelength is closely related to the self-heating effect.更多还原