【摘要】 采用气相色谱和核磁共振硅谱对多晶硅行业副产氯代二硅烷的成分进行了分析。研究了氯化氢、有机胺催化剂和反应温度对氯代二硅烷裂解反应的影响。结果表明，氯代二硅烷中主要含有Si₂Cl₆、Si₂HCl₅、Si₂OCl₆、SiCl₄和SiHCl₃。芳香胺作催化剂时，无裂解试剂氯化氢存在下Si₂Cl₆和Si₂HCl₅不发生裂解反应，通入氯化氢后Si₂Cl₆和Si₂HCl₅迅速发生裂解反应生成SiHCl₃和SiCl₄;脂肪胺作催化剂时，无裂解试剂氯化氢存在下Si₂HCl₅可在30 min内完全裂解，通入氯化氢后Si₂Cl₆开始进行裂解反应；在有机硅胺存在下，氯代二硅烷中的Si₂OCl₆不发生裂解反应，Si₂HCl₅比Si₂Cl₆更容易发生裂解反应，氯化氢的加入有助于裂解反应的进行；氯代二硅烷裂解反应的催化剂优选N,N-二甲基苯胺，此时氯代二硅烷裂解率和氯代单硅烷收率均随着反应温度的升高而升高。更多还原

【Abstract】 The components of chlorinated disilane in polysilicon industry were analyzed by gas chromatography and nuclear magnetic resonance silicon spectroscopy. The effects of hydrogen chloride, organic amine and reaction temperature on the cracking reaction of chlorinated disilane were studied. The results show that the chlorinated disilane mainly contains Si₂Cl₆, Si₂HCl₅, Si₂OCl₆, SiCl₄ and SiHCl₃. When aromatic amine was used as catalyst, Si₂Cl₆ and Si₂HCl₅ did not undergo cracking reaction in the absence of cracking reagent of hydrogen chloride. After the introduction of hydrogen chloride, Si₂Cl₆ and Si₂HCl₅ rapidly underwent cracking reaction to produce SiHCl₃ and SiCl₄. When aliphatic amine was used as catalyst, Si₂HCl₅ could be completely decomposed within 30 min without the presence of cracking reagent hydrogen chloride, and Si₂Cl₆ began cracking reaction after the introduction of hydrogen chloride. In the presence of organosilamine, the cleavage of Si₂OCl₆ in chlorinated disilane did not occur, and the cracking of Si₂HCl₅ was more likely than that of Si₂Cl₆. The addition of hydrogen chloride helps the cracking reaction. N,N-dimethylaniline is preferred as the catalyst for the cracking reaction of chlorinated disilane. In this case, the cracking rate of chlorinated disilane and the yield of chlorinated monosilane increases with increasing temperature.更多还原