【摘要】 X射线成像被广泛应用于医疗健康、工业探伤等领域。相比传统依赖化学显影的照相方式，基于CMOS工艺的X射线图像传感器具有实时输出、便捷性强、成本低、图像质量高等优势，正逐渐成为此领域发展的主流方向。本文将从CMOS X射线图像传感器的检测原理与基本架构出发，介绍其材料优化、像素电路、阵列系统等方面的最新进展，并总结近20年间X射线图像传感器在像素数量、电路架构和工艺等维度的发展和演进趋势。更多还原

【Abstract】 X-ray imaging has been widely used for health care and flaw detection applications.Compared to traditional X-ray photography that relies on chemical processes,X-ray imaging based on CMOS processes has become the mainstream research topic of this field due to its in-vivo response,high convenience,low cost,and high image quality.This paper will introduce the basic sensing principle and system architecture of CMOS X-ray image sensors.It will also cover the recent advances in sensing material,pixel-level circuit design,and readout arrays.Finally,the paper will summarize the achievements and evolutionary trends of CMOS X-ray image sensors regarding the number of pixels,circuit architecture,and process nodes in the last 20 years.更多还原