【摘要】 为了减少单晶硅太阳电池的光学损失，需在硅片表面制备大小合适且分布均匀致密的金字塔结构。基于此目的，在一步制绒基础上开发出两步制绒工艺，即原硅片依次经过两个化学溶液配比不同、反应时间不同的制绒槽。第1个槽药液浓度较高，化学反应速率较快，金字塔能够快速成核生长；第2个槽药液浓度较低，化学反应速率较慢，从而获得结构独立且均匀性较好的金字塔。实验表明：第1个槽的最佳反应时间在250～300 s，第2个槽的最佳反应时间在100～130 s。相对于一步制绒工艺，两步制绒工艺形成的硅片表面反射率降低0.5%，增加了表面对光的吸收，可使太阳电池获得更高的光电转换效率。更多还原

【Abstract】 In order to reduce optical losses in monocrystalline silicon solar cells,it is necessary to obtain a uniform and dense pyramidal structure on the surface of the crystalline silicon. A two-step texturing process has been developed for this purpose,whereby the wafers are sequentially passed through two texturing tanks with different chemical solution ratios and different reaction times. The first tank has a higher concentration of the chemical solution and a faster reaction rate,resulting in fast nucleation of the pyramids;the second tank has a lower concentration of the chemical solution and a slower reaction rate,resulting in structurally independent and homogeneous pyramids. Experiments show that the optimum reaction time is 250-300 s for the first step texturing and 100-130 s for the second step texturing,and that the surface reflectivity of the wafers formed by the two-step texturing is reduced by 0.5% compared to the one-step texturing,which increases the absorption of light by the wafer and enables the solar cell to achieve higher photoelectric conversion efficiency.更多还原