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全氢聚硅氮烷涂层在光电领域的研究进展
Research progress of perhydropolysilazane coating in the field of optoelectronics
【摘要】 以全氢聚硅氮烷(PHPS)作为前驱体制备的涂层在光电领域有较高的应用价值。介绍了PHPS分子结构和PHPS涂层的形成机理,搜集整理了PHPS涂层的期刊文献与专利文献,根据功能将PHPS涂层分为介电层、阻隔层、光学层,以及其他功能层,分析了不同功能涂层中PHPS结构、改性原料、制备方法、涂层结构等因素对涂层性能的影响,对PHPS涂层在我国应用现状进行总结并提出未来的展望。
【Abstract】 Coatings prepared with perhydropolysilazane(PHPS) as precursors have high application value in the field of optoelectronics.The molecular structure of PHPS and the formation mechanism of PHPS coating were introduced based on the collects and sorts journal literature and patent literature of PHPS coating.The coatings were divided into dielectric layer, gas barrier layer, optical layer and other functional layers according to their functions.The influence of PHPS structure, modified raw materials, preparation methods, coating structure and other factors on the coating performance were analyzed in different functional coatings.In addition, the application status of PHPS coating in our country was summarized and the perspectives in this field was provided.
- 【文献出处】 南昌大学学报(工科版) ,Journal of Nanchang University(Engineering & Technology) , 编辑部邮箱 ,2023年02期
- 【分类号】TB306;TN29
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