【摘要】 光功率的测量是光学研究领域最重要、最常用的计量技术之一，尤其在光通信、激光测绘等领域，同时具有优于皮瓦量级灵敏度和大动态范围的光功率测量是用于系统测试和标定的极为关键的技术，然而目前商售的光功率计测量灵敏度通常仅能达到纳瓦量级。本文发展了一种极限灵敏度可达稀疏光子水平的光功率测量装置，测量系统采用硅雪崩光电二极管单光子探测器，使用散射片和电控光阑精密控制待测信号光强度，实现了在20 fW～300μW范围内的光功率测量，功率测量的响应波长范围可以覆盖530～860 nm，测量误差小于3.7%，重复性测量相对标准偏差小于1.9%，能够满足微弱信号光功率测量需求。这种兼具高灵敏度和大动态范围的光功率测量方法有望解决强度微弱至稀疏光子水平的光信号计量难题。更多还原

【Abstract】 The measurement of optical power is one of the most important and commonly used measurement techniques in the field of optical research, especially in the field of optical communication, laser mapping and so on. At the same time, the measurement of optical power with better than pW level sensitivity and large dynamic range is a very key technology for system testing and calibration. However, the measurement sensitivity of commercial optical power meters usually can only reach nW level. In this paper, an optical power measuring device with limit sensitivity up to the sparse photon level is developed. The measuring system bases on the silicon avalanche photodiode(Si APD), simultaneously employs the combination of diffuser and electronic diaphragm to achieve precise intensity control of the measured signal light. The accurate optical power measurement in the range of 20 f W ～ 300 μW is achieved, and the response wavelength range of power measurement can cover 530 ～ 860 nm. The measurement error is proved less than 3.7%, and the relative standard deviation of repeatability is measured less than 1.9%, which can well meet the requirements of the weak optical signal power measurement. This optical power measurement method with both of high sensitivity and large dynamic range is expected to be used in many fields which are facing the difficulty of metering the weak signal in sparse photon level.更多还原