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透射电子显微镜样品的制备方法及技术综述

Review of Preparation Methods and Techniques of TEM Samples

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【作者】 卢照魏慧欣陈霞曾红霞丁雨葵宋武林

【Author】 LU Zhao;WEI Hui-xin;CHEN Xia;ZENG Hong-xia;DING Yu-kui;SONG Wu-lin;Analytical and Testing Center, Huazhong University of Science and Technology;School of Materials Science and Engineering, Huazhong University of Science and Technology;

【通讯作者】 宋武林;

【机构】 华中科技大学分析测试中心华中科技大学材料科学与工程学院

【摘要】 透射电子显微分析技术已成为科学研究过程中十分重要的表征手段,可以对材料内部的微观形貌、微区结构以及微区成分进行精细分析,是探索物质本质的强有力工具。那么,透射电子显微镜样品的制备方法及技术就显得尤为重要。结合近几年来的相关报道,阐述了各种透射电子显微镜样品制备方法及技术的基本原理及具体操作步骤,同时对不同类型的透射电子显微镜样品适用的制备方法进行了总结,以期为科研人员进行透射电子显微镜样品制备提供参考。

【Abstract】 Transmission electron microscopic analysis technique has become a very important characterization in the process of scientific research. It can carry out fine analyses for materials, including the microscopic morphology, micro-structure and micro-composition, this shows that transmission electron microscope is a powerful tool to explore the nature of materials. Therefore, the preparation methods and techniques of transmission electron microscope samples are particularly important. Combining with the related reports in recent years, the basic principles and concrete operation steps of various preparation methods for transmission electron microscope samples were expressed. meanwhile, different transmission electron microscope preparation methods applicable to different types of samples were summarized. The purpose of this study is to provide a reference for researchers to prepare transmission electron microscope samples.

【关键词】 透射电子显微镜样品制备方法技术
【Key words】 TEMsample preparationmethodtechnique
【基金】 国家自然科学基金(2009CB939705)
  • 【文献出处】 科学技术与工程 ,Science Technology and Engineering , 编辑部邮箱 ,2023年19期
  • 【分类号】TN16
  • 【下载频次】86
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