【摘要】 类金刚石薄膜由于其独特的物理化学特性，使得该薄膜在光学、电学、机械、医学、航空航天等领域得到了广泛应用。等离子体增强化学气相沉积(plasma enhanced chemical vapor deposition, PECVD)制备类金刚石是近几十年兴起的新的制备类金刚石薄膜的方法，因其对沉积温度要求低，对基底友好，同时还具有沉积速率快和无转移生长的优势，获得了越来越多的研究者关注。详细介绍了类金刚石薄膜优异的特性，阐述了在等离子化学气相沉积条件下，不同沉积条件对沉积类金刚石薄膜结构特性的影响。衬底的选择直接影响着沉积类金刚石薄膜的性能，不同的衬底直接决定着生成类金刚石结构中sp~3相的数量和质量；沉积参数是最为常见的控制条件，对沉积薄膜的总体效果影响也是最大的，改变沉积参数，沉积薄膜的表面将会变得更加光滑致密；常用的掺杂元素是硅和氮，掺杂元素的引入往往是为了降低沉积薄膜的内应力，提高与衬底间的结合力，延长使用寿命等；由于很难直接在金属上沉积类金刚石薄膜，所以常通过制备复合层来改善沉积效果。最后对类金刚石薄膜的发展以及今后研究方向进行了展望。更多还原

【Abstract】 Due to their unique physicochemical properties, diamond-like carbon films have been widely utilized in many fields, such as optics, electronics, mechanics, medicine, aerospace, etc.PECVD(plasma enhanced chemical vapor depositionis) a new method to prepare diamond-like carbon films in recent decades. With its low deposition temperature requirement, substrate friendliness, rapid deposition rate, and lack of transfer growth, it has attracted the interest of an increasing number of researchers. The outstanding properties of diamond-like carbon films were described in depth, and the effects of various deposition conditions on the structural properties of diamond-like carbon films deposited by plasma chemical vapor deposition were discussed. The choice of the substrate directly affects the properties of deposited DLC(diamond like carbon)films, and different substrates directly determine the quantity and quality of sp~3 phase in the DLC structure. The deposition parameters are the most prevalent control conditions that had the greatest impact on the deposited film’s overall effect. Changing the deposition parameters will make the surface of the deposited film smoother and denser. Silicon and nitrogen are frequently used as doping elements to reduce the internal stress of the deposited film, enhance the adhesion to the substrate, and increase the service life. As it is difficult to deposit diamond-like carbon films on metals directly, composite layers are often prepared to improve the deposition effect. Ultimately, the development and future research direction of carbon films that resemble diamonds are demonstrated.更多还原