【摘要】 采用磁控溅射技术制备了Al:WS₂薄膜。为考查不同气氛热冲击下Al:WS₂薄膜摩擦学性能的响应机理,采用自行研制的温度交变真空摩擦试验机开展了真空、氮气及氧气气氛的–100～+250℃的热冲击试验,并对热冲击后Al:WS₂薄膜结构、成分以及摩擦学性能进行了研究。研究发现,热冲击后,Al:WS₂薄膜柱状晶长大,S含量减少,部分WS₂被氧化为WO₃,薄膜硬度增加。经氮气热冲击后,薄膜的（002）衍射峰强度明显增强,使得摩擦系数降低。经真空热冲击后,在薄膜表面形成的WO₃起到磨粒磨损作用,减少了薄膜寿命;经氧气热冲击后,Al:WS₂薄膜中大量起润滑作用的WS₂被氧化为WO₃,薄膜的寿命显著缩短。更多还原

【Abstract】 Al:WS₂ films were prepared by magnetron sputtering technology. In order to investigate the response mechanism of the tribological properties of Al:WS₂ film under different ambient thermal shock,the thermal shock tests of –100～+250℃ in vacuum, nitrogen and oxygen were carried out using the temperature altering vacuum tribometer developed, and the structure, composition and tribological properties of Al:WS₂ films after thermal shock were mainly studied. It was found that the columnar crystal of Al:WS₂ film grows, S content decreases, part of WS₂ is oxidized to WO₃, and the hardness of film increases after thermal shock. After thermal shock under nitrogen atmosphere, the intensity of （002） diffraction peak of Al:WS₂ film is obviously enhanced, and the friction coefficient decreased. After thermal shock with vacuum, WO₃ appears on the surface of Al:WS₂ film plays the role of abrasive wear,which reduces the life of film. After oxygen thermal shock, a large number of WS₂ is oxidized to WO₃,and the wear life of the film is significantly shortened due to the serious abrasive wear.更多还原