【摘要】 高灵敏度力值测量是能量天平实现高精度千克复现研究的关键，现有横梁天平测力法与商用质量比较器测力在能量天平力值测量中会引入额外误差项。针对该问题，提出了一种基于多柔性铰链的高灵敏度力传感装置设计方法，该方法通过多柔性铰链实现力值与机构形变间的转换，然后利用激光干涉仪测量机构形变，实现高灵敏度力值测量，通过理论与有限元仿真分析对装置灵敏度和模态进行了仿真分析，该设计方法可实现灵敏度达8.13 N/m的力值传感。此项研究对下一代能量天平设计与千克复现研究有重要意义。更多还原

【Abstract】 Highly sensitive force measurement is a crucial aspect in the research of high precision kilogram realization using a Joule balance. Current force measurement methods involving beam balances and commercial mass comparators introduce additional errors in the Joule balance force measurements. In response to this challenge, we propose a design method for a high-sensitivity force sensing device based on multiple flexure hinges. This method uses multiple flexure hinges to translate force into structural deformation, which is then measured using a laser interferometer, enabling highly sensitive force measurements. We have carried out theoretical and finite element simulation analyses to simulate the sensitivity and modal performance of the device. This method can achieve a force sensing sensitivity of up to 8.13 N/m. Our research carries significant implications for the design of next-generation Joule balances and the advancement of kilogram realization studies.更多还原