【摘要】 为了实现可见光波段不同波长多路激光的精密合束，设计了一套激光合束系统。通过长焦距镜头和高缩束倍率镜头配合大面阵光电探测器分别实现合束激光指向与位置的高精度、实时监测；通过高精度的角度调节平台和位置调节平台分别实现光束指向和位置监测误差的实时补偿。在完成光束指向、位置监测镜头的设计加工及精密装调后，获得位置监测装置的监测分辨率为0.054 mm,指向监测装置的监测分辨率为3.5μrad;在完成光束位置校正平台、指向校正两维摆镜、闭环控制系统合束流程的详细设计后，对合束系统的合束精度进行实验检测和误差分析。实验结果表明：合束系统短时间内针对稳定光束的合束精度为：指向6.17μrad,位置优于0.66 mm;长时间内针对缓慢漂移光束的合束精度为：指向18.46μrad,位置优于0.72 mm。因此，所设计的激光合束系统合束精度高，并且可及时对光束的漂移误差进行自动补偿，满足系统的应用要求。更多还原

【Abstract】 A laser beam combining system is designed to realize the precision combining of multiple laser beams of different wavelengths in visible wavelengths.The long focal lens and high beam reduction lens with large surface array photodetectors are used to achieve high precision and real-time monitoring of the laser beam pointing and position.The high precision angle adjustment device and position adjustment device are used to achieve real-time compensation of the beam pointing and position monitoring errors.After completing the design, processing and precision tuning of the beam pointing and position monitoring lenses, the monitoring accuracy of the position monitoring device is 0.054 mm and that of the pointing monitoring device is 3.5 μrad; after completing the detailed design of the beam position correction device, the pointing correction two-dimensional pendulum mirror and the beam combining process of the closed-loop control system, the beam combining accuracy of the combining system is experimentally tested and analyzed.The experimental results show that the pointing accuracy is 6.17 μrad and the position accuracy is better than 0.66 mm for static beam in a short time; the pointing accuracy is 18.46 μrad and the position accuracy is better than 0.72 mm for dithered beam in a long time.The designed laser beam combining system not only has high beam combining accuracy, but also can realize the automatic compensation of beam drift error in time, which will meet the application requirements of the system.更多还原