【摘要】 激光干涉位移测量技术因具有大量程、高分辨力、非接触式及可溯源性等特点，成为当前与下一代高端装备、超精密计量的基础性技术之一。在简要介绍国内外现有的各类亚纳米级激光干涉仪的基础上，重点从“精”“准”“快”方面综述了面向亚纳米、皮米级激光干涉位移测量技术的研究成果。首先，从激光干涉测量原理出发，分析了限制激光干涉仪中测量分辨力、速度等进一步提升的主要误差项及技术难点；其次，重点列举了近年来国内外在激光器高精度稳频、高精度干涉镜组、高速/高分辨力相位细分技术、环境补偿与控制等方面所取得的重大关键技术突破；最后，对下一代超精密激光干涉位移测量技术的发展趋势进行了总结与展望。更多还原

【Abstract】 Laser interference displacement measurement technology has become a fundamental one for the current and next-generation high-end equipment and ultra-precision metrology due to its large range, high resolution, noncontact, and traceability. Based on a brief introduction of various existing sub-nanometer laser interferometers, in this study, we review the research results of sub-nanometer-and picometer-level laser interference displacement measurement technology from the aspects of precision, accuracy, and speed. First, starting from the principle of laser interferometer, the main errors and technical difficulties that limit the improvement of resolution and speed of displacement measurements are analyzed.Second, the major technological breakthroughs made in recent years in laser high-precision frequency stabilization, highprecision interferometric mirrors, high-speed/high-resolution phase subdivision technology, and environmental compensation and control are highlighted. Finally, the development trends of the next-generation ultra-precision laser interference displacement measurement technology is summarized and prospected.更多还原