Active tuning of Si metasurface with large area

【摘要】 All-dielectric metasurfaces are usually limited because of their static functionality and small scale. In this paper, we use an easy nanofabrication technique to fabricate all-dielectric metasurfaces with the advantages of having dynamic tunability and a large area. Using an anodized aluminum oxide(AAO) template as an evaporation mask, a large-area metasurface embedded in polydimethylsiloxane(PDMS)(> 2 cm~2) is fabricated. The metasurface exhibits remarkable electric dipole(ED) and magnetic dipole(MD) resonances. Based on the solvent-swelling effect of PDMS in 20% toluene, the ED/MD resonance peak shifts dynamically ～40 nm to red. So far, to the best of our knowledge, a large-area metasurface embedded in PDMS and achieved by using the AAO template method has not appeared.更多还原

【Abstract】 All-dielectric metasurfaces are usually limited because of their static functionality and small scale. In this paper, we use an easy nanofabrication technique to fabricate all-dielectric metasurfaces with the advantages of having dynamic tunability and a large area. Using an anodized aluminum oxide(AAO) template as an evaporation mask, a large-area metasurface embedded in polydimethylsiloxane(PDMS)(> 2 cm~2) is fabricated. The metasurface exhibits remarkable electric dipole(ED) and magnetic dipole(MD) resonances. Based on the solvent-swelling effect of PDMS in 20% toluene, the ED/MD resonance peak shifts dynamically ～40 nm to red. So far, to the best of our knowledge, a large-area metasurface embedded in PDMS and achieved by using the AAO template method has not appeared.更多还原