【摘要】 安全滤网阵列网孔的高效、高品质和高适应性加工至今仍面临重大技术挑战。基于此，提出采用激光-电解组合加工技术制备安全滤网阵列网孔结构。介绍了激光-电解组合加工技术的试验加工系统，探究了工艺参数对微孔形貌质量和加工精度的影响规律，并开展了安全滤网阵列网孔的制备。试验结果表明：激光加工路径显著影响微孔出口的形貌，采用同心圆轨迹（外径270μm，内径230μm，线间距2.5μm）能够显著改善微孔出口的圆度；激光功率越大、切割速度越小，微孔直径及其热影响区均越来越大；NaNO3-乙二醇溶液作为电解抛光液能够在加工表面形成扩散层发生电解抛光，将激光加工产生的喷溅物和毛刺等缺陷去除；基于优化工艺参数，加工出253个直径0.31 mm的阵列网孔结构，出入口直径方差仅为2.02和1.71，展示出较高的尺寸一致性。激光-电解组合加工技术在薄壁件上高效、高品质制备阵列网孔结构方面具有很强工艺能力和发展潜力。更多还原

【Abstract】 Highly effective and adaptable fabrication of high-quality micro-hole arrays for safety filters remains challenging. Therefore, in this study, a combination of laser and electrochemical machining technology was developed for preparing micro-hole arrays for safety filters. An experimental processing system for laser–electrochemical combined machining was devised, the effects of process parameters on the processing quality were investigated, and a safety filter sample was prepared. The results indicated that in the laser processing, the laser cutting path significantly affects the outer shape of the through-hole, and the outer roundness of the through-hole can be significantly improved using the optimized concentric circle path(outer diameter: 270 μm, inner diameter: 230 μm, and spacing distance: 5 μm). A higher laser power and lower cutting speed correspond to a larger through-hole diameter and heat-affected zone. NaNO3-ethylene glycol solution as polishing electrolyte can form a diffusion layer on the machining surface for electrolytic polishing and remove the spatters and burrs generated by laser processing. Using the optimized process parameters, 253 micro-hole structures with a diameter of 0. 31 mm were machined, and the variance of the inlet and outlet diameters was only 2. 02 and 1. 71, respectively, indicating a high dimensional consistency. The laser-electrochemical combined process has considerable potential for the fabrication of highquality micro-hole arrays on thin-walled workpieces.更多还原