【摘要】 表面声波（SAW）技术已广泛应用于无线通信、传感器、微流体、光子学和量子信息处理等领域。然而，由于制造问题，SAW器件的频率通常限制在几千兆赫兹以内，这严重限制了它们在5G通信、精密传感、光子学和量子控制中的应用。为了解决这一关键问题，我们提出了一种混合策略，将纳米制造工艺（即纳米光刻）与LiNbO₃/SiO₂/SiC异质结构集成在一起，并成功实现了SAW器件约44 GHz的破纪录频率，此外还有高达15.7%的大机电耦合系数。我们进行了理论分析，并确定了在这些慢对快SAW平台上产生的引导高阶波模式。为了证明所提出的超高频SAW平台的卓越传感性能，我们进行了微质量传感，获得了约33151.9 MHz·mm²·μg^-1的极高灵敏度，比传统石英晶体微量天平（QCM）高约1011倍，比频率为978 MHz的传统SAW器件高约4000倍。更多还原

【Abstract】 Surface acoustic wave（SAW） technology has been extensively explored for wireless communication,sensors,microfluidics,photonics,and quantum information processing.However,due to fabrication issues,the frequencies of SAW devices are typically limited to within a few gigahertz,which severely restricts their applications in 5G communication,precision sensing,photonics,and quantum control.To solve this critical problem,we propose a hybrid strategy that integrates a nanomanufacturing process（i.e.,nanolithography） with a LiNbO₃/SiO₂/SiC heterostructure and successfully achieve a record-breaking frequency of about 44 GHz for SAW devices,in addition to large electromechanical coupling coefficients of up to 15.7%.We perform a theoretical analysis and identify the guided higher order wave modes generated on these slow-on-fast SAW platforms.To demonstrate the superior sensing performance of the proposed ultra-high-frequency SAW platforms,we perform micro-mass sensing and obtain an extremely high sensitivity of approximately 33151.9 MHz·mm²·μg^-1,which is about 10¹¹ times higher than that of a conventional quartz crystal microbalance（QCM） and about 4000 times higher than that of a conventional SAW device with a frequency of 978 MHz.更多还原