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氮化铝Lamb波谐振器的能量损耗分析研究
Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators
【摘要】 本文介绍了工作频率为400 MHz和2 GHz氮化铝Lamb波谐振器的结构设计、微纳制造及测试表征,研究了锚点损耗和声子间相互作用损耗对Lamb波谐振器品质因数(Q值)的影响,并分析了不同工作频率的Lamb波谐振器的主要能量损耗来源.研究发现:对于低频谐振器,锚点损耗为其主要能量损耗来源,因此减小支撑轴宽度可减少通过支撑轴泄漏至衬底的能量,进而提高Q值;对于高频谐振器,声子间相互作用损耗为其主要能量损耗来源,因此相比于金(Au),采用铝(Al)作为叉指电极(IDT)材料的谐振器具有更高Q值.针对Lamb波谐振器的结构特点,设计了一套基于七步光刻工艺的微纳制程,成功制备了具有微型化释放腔体的Lamb波谐振器,并具备优异的性能.测试结果表明,工作频率为400 MHz和2 GHz的Al-IDT谐振器的串联品质因数(Qs)分别达到2 590和1 192.
【Abstract】 In this paper, the structural design, micro-nano fabrication and test characterization of AlN Lamb wave resonators with operating frequencies of 400 MHz and 2 GHz were studied. The effects of anchor loss and interaction loss between phonons on the quality factor(Q value) of Lamb wave resonators were analyzed, and the main energy loss sources of Lamb wave resonators at different operating frequencies were clarified. The results show that for low-frequency resonators,the anchor loss is the main source of energy loss, so reducing the width of the support shaft can reduce the energy leaking to the substrate through the support shaft, thereby increasing the Q value. For high-frequency resonators, the loss of interaction between phonons is the main source of energy loss, so the resonator using aluminum(Al) as the interdigital electrode(IDT)material has a higher Q value than gold(Au). According to the structural characteristics of the designed Lamb wave resonators, a fabrication technology based on seven-step lithography process was designed, and the Lamb wave resonators with miniaturized release cavities were successfully fabricated with excellent performance. The test results show that the series quality factors(Qs) of Al-IDT resonators operating at 400 MHz and 2 GHz reach 2 590 and 1 192, respectively.
【Key words】 MEMS; Lamb wave resonator; quality factor; energy loss; manufacturing process;
- 【文献出处】 电子学报 ,Acta Electronica Sinica , 编辑部邮箱 ,2023年01期
- 【分类号】TN751.2
- 【下载频次】21