【摘要】 微机电系统（Micro-Electro-Mechanical System,MEMS）是一种基于半导体技术，以硅作为主要材料，集成了微机电元件和微电子信息处理系统的微型器件。这种器件通常是在硅晶片上制造的，采用半导体加工技术，通过光刻和刻蚀等工艺在半导体材料上制造微型机械结构，如微桥和悬臂梁，并将它们与电路相融合，形成一个可以采集信号的装置。硅的机械性能良好，可以作为微型机械的结构材料，而且与传统的集成电路制造工艺兼容。文章主要探讨了MEMS传感器的发展及其在医疗领域中的应用。首先，介绍了MEMS传感器的定义和发展历程，举例说明其工作原理、主要类型以及发展趋势；然后，重点讨论了MEMS压力传感器在医疗诊断、临床治疗和健康监测中的应用；最后，对MEMS传感器面临的主要挑战和发展机遇进行总结，并对其在医疗领域的应用前景进行展望。更多还原

【Abstract】 Micro-Electro-Mechanical Systems(MEMS) is a miniaturized device based on semiconductor technology, primarily utilizing silicon as the main material, which integrates microelectromechanical components with microelectronic information processing systems.Typically fabricated on silicon wafers, these devices employ semiconductor fabrication techniques to create microscale mechanical structures,such as micro-bridges and cantilevers, on semiconductor substrates through processes like photolithography and etching. These structures are then integrated with circuits to form a device capable of sensing and collecting signals. Due to silicon’s excellent mechanical properties and compatibility with conventional integrated circuit manufacturing processes, it serves as an ideal structural material for microscale mechanisms. The paper primarily explores the development of MEMS sensors and their applications in the field of healthcare. First,introduce the definition and historical development of MEMS sensors, provide examples illustrating their operational principles, major types,and development trends; Then, focus on discussing the applications of MEMS pressure sensors in medical diagnostics, clinical treatment, and health monitoring; Finally, summarize the key challenges and opportunities facing MEMS sensors and provide an outlook on their prospects in the healthcare sector.更多还原