【摘要】 针对高空气象探测领域中温湿度骤变产生水分凝结而影响测量精度问题，开展了集成加热功能的湿度传感器研究，通过仿真手段，优化了加热器结构；通过对感湿膜成膜工艺进行研究，提高了传感器灵敏度、降低了湿滞和响应时间；通过将MEMS工艺与有机薄膜成膜工艺相结合，实现了湿度传感器制作。按照湿度传感器测试方法进行了性能测试，结果表明，该湿度传感器灵敏度> 0.40 pF/%RH、湿滞<1.5%RH、非线性<1.5%、响应时间<2 s；对加热器除湿能力进行了试验，结果表明，启动加热2 s即可有效去除湿度传感器表面的液态水滴。更多还原

【Abstract】 Aiming at the problem of moisture condensation caused by sudden temperature and humidity changes in the field of high altitude meteorological detection, a humidity sensor with integrated heating function was studied. By studying the film forming process,the sensitivity of the sensor is improved, and the wet hysteresis and response time are reduced. By combining the MEMS process with the organic film forming process, the humidity sensor is fabricated. The results show that the sensitivity of the humidity sensor is>0.40 pF/%RH,the humidity hysteresis is<1.5%RH, and the response time is less than 2 s. The dehumidification ability of the heater is tested, and the results show that the liquid water droplets on the surface of the humidity sensor can be effectively removed by starting the heating for 2 s.更多还原