【摘要】 针对目前磁悬浮轴承普遍采用电涡流传感器作为位移检测，而对于电容传感器的研究相对较少的现状，从电容传感器在磁悬浮轴承系统中的应用难点出发，提出了一种适用于检测浮地目标微位移的非接触式电容传感器，通过有限元仿真，验证了传感器结构的可行性，并分析了传感器结构参数对传感器性能的影响。设计微小电容检测电路，包括前级C-V转换电路、精密检波电路、滤波电路以及差分放大电路，结果表明：该结构的电容传感器以及检测电路能够满足磁悬浮系统反馈环节的性能要求。更多还原

【Abstract】 Aiming at current situation that magnetic suspension bearing generally uses eddy current sensor as displacement measurement, but the research on capacitive sensor is relatively less, from the difficulties of capacitive sensor in the application of magnetic suspension bearing system, put forward a non-contact capacitive sensor applicable to detection of floating target micro displacement, through the finite element simulation, verify the feasibility of the sensor structure, and analyze the effect of sensor structure parameters on performance of the sensor.Design small capacitance detection circuit, including C-V conversion circuit, precise detecting circuit, filtering circuit and differential amplifier circuit.The results show that the structure of capacitive sensor and detection circuit can meet the performance requirements of the feedback link of the maglev system.更多还原