【摘要】 设计和研究了一种带有高压驱动电路的多环盘式硅微陀螺仪（DRG）。该陀螺仪具有MEMS嵌套环结构，工作在三波腹（n=3）的振动模态下，主振型和从振型之间具有更小的频率裂解。系统采用双闭环测控电路驱动，结构简单，具有良好的稳定性和较大的带宽。其中刚度调谐和正交误差校正所需要的高压直流电由小型化的Boost升压电路提供。样机测试结果表明闭环Boost升压电路精度高，对陀螺仪的零偏不稳定性影响小。陀螺仪具有高品质因数（Q=36 503）、低非线性度(314×10^-6)、低角度随机游走（■）以及低零偏不稳定性（2.022 9°/h）。更多还原

【Abstract】 A multi-ring disk resonant gyroscope（DRG）with a high-voltage driving circuit is designed and studied.The gyroscope has a MEMS nested ring structure and works in three antinodes（n=3） vibration modes,with smaller frequency splitting between the drive mode and the sense mode.The system is driven by the double closed-loop measurement and control circuit,with simple structure,good stability and large bandwidth.The high-voltage direct current for the stiffness tuning and the quadrature error correction is provided by a miniaturized boost chopper.The test result shows that the closed-loop boost chopper has high precision and little influence on the bias instability of the gyroscope.The gyroscope has a high quality factor（Q=36 503）,a low nonlinearity(314×10^-6),a low angle random walk（■）,and a low bias instability（2.022 9°/h）.更多还原