【摘要】 直流偏置电压是电容式微机械超声换能器的一个重要参数。以实验室设计制造的电容式微机械超声换能器为基础，研究不同的直流偏置电压对电容式微机械超声换能器的振动位移、振动速度、发射灵敏度、发射声压、接收灵敏度和中心频率的影响。结果表明：直流偏置电压值对器件收发性能有很大的影响，应根据使用目的不同选择合适的直流偏置电压。更多还原

【Abstract】 DC bias voltage is an important parameter of capacitive micromachined ultrasonic transducer. Based on the capacitive micromachined ultrasonic transducer designed and manufactured in the laboratory, this paper studies the effects of different DC bias voltages over the vibration displacement, vibration velocity, emission sensitivity, emission sound pressure, receiving sensitivity and the center frequency of the transducer. The conclusion is that it is necessary to select appropriate DC bias voltage according to the purpose of use since DC bias voltage value has big influence on the transceiver performance of the device.更多还原