【摘要】 利用热丝化学气相沉积(HFCVD)设备中的钽丝为加热源和钽源，在石墨基底上直接制备TaC纳米颗粒，并研究不同热丝功率对TaC颗粒尺寸及其致密度的影响。实验结果表明：当热丝功率为1 600 W时，TaC颗粒致密度低，颗粒尺寸较小，约为14 nm;随着功率逐渐增大，TaC颗粒致密度逐渐增高，颗粒尺寸缓慢增大；当功率增大到2 400 W时，TaC颗粒致密度高且形貌规则，颗粒尺寸增加到35 nm左右。研究结果为TaC纳米颗粒的制备提供了新方法。更多还原

【Abstract】 Using the tantalum filament in the hot filament chemical vapor deposition(HFCVD) equipment as the hot source and tantalum source, TaC nanoparticles were directly prepared on the graphite substrate, and the effects of different hot filament power on the size and density of TaC particles were studied. The results show that when the hot filament power is 1 600 W, the density of TaC particles is low, and the particle size is smaller(about 14 nm); as the power increases, the density of TaC particles gradually increases, and the particle size increases slowly; when the power increases to 2 400 W, the TaC particles are dense with regular morphology, and the particle size increases to about 35 nm. The results provide more information for the preparation of TaC nanoparticles.更多还原