【摘要】 将具有表面微结构和平整的热塑性聚氨酯（TPU）传感基片封装成压阻型柔性压力传感器，其中前者（尺寸为10 mm×10 mm）的表面喷涂不同质量（0.02、0.05、0.1 g）的多壁碳纳米管（MWCNTs），并对微结构柔性传感基片表面形貌及传感器性能进行了表征和分析。结果表明，微结构传感基片表面上微柱顶面形成一定厚度的MWCNTs层，层内MWCNTs形成网络；喷涂较高MWCNTs质量时，传感器具有较高的灵敏度和较低的检测限，这归因于压力所致MWCNTs的网络搭接程度和传感基片间接触面积的增加量较大；喷涂0.1 g MWCNTs时，传感器的灵敏度为0.143 kPa-1(0～3 kPa)，检测限低至100 Pa，在较宽压力范围内（3～200 kPa）仍有一定的压阻响应，能在4 000次的循环压缩/释放测试（峰值压力约200 kPa）中保持稳定的压阻响应，且可准确检测典型人体运动所产生的压阻响应，具有应用于智能穿戴领域的潜能。更多还原

【Abstract】 Flexible piezoresistive pressure sensors were prepared through assembling the surface-microstructural and the flat thermoplastic polyurethane sensing substrates. The surface of the microstructural substrate with a size of 10 mm×10 mm was sprayed with diffe-rent masses of multi-walled carbon nanotubes(MWCNTs)(0. 02,0. 05 and 0. 1 g). The surface morphology of the microstructural flexible sensing substrate and the performance of the sensors were characterized and analyzed. The results demonstrated that there was a carbon nanotube layer with a certain thickness formed on the top surfaces of the microcolumns on the microstructural substrate. The sensor based on the microstructural sensing substrate sprayed with a greater mass of MWCNTs exhibited a higher sensitivity and a lower detection limit. This may be attributed to greater increments in the pressure-induced overlap degree of the MWCNTs network and the contact area between the sensing substrates. The sensor based on the microstructural sensing substrate sprayed with 0. 1 g MWCNTs presented a higher sensitivity of 0. 143 k Pa-1(0～3 kPa),a lower detection limit of 100 Pa,together with a certain piezoresistive response in the wide pressure range of 3～200 kPa. Moreover,the sensor maintained a stable piezoresistive response during the4 000-cycle compression/release test with a peak pressure of 200 kPa,and had an accurate detection capability toward the piezoresistive responses generated by typical human motions. The sensor exhibits great application potential for intelligent wearables.更多还原