【摘要】 扫描电子显微镜在材料形貌、结构及成分的观察和分析研究中起到非常重要地作用,具有成像景深大、分辨率高、立体感强等特点。以日立SU3500扫描电子显微镜为例,结合多年测试维护保养经验,阐述其最佳工作状态的维护需要处理好硬件设备维护、测试样品制备及电镜工作参数调节等工作。通过详细分析这三大影响因素,提出实践中的一些相应维护方法和改进措施(如灯丝型号选择及安装、工作参数具体设定等),最终达到延长电镜工作寿命,提升使用性能的目的,为其他使用者提供一个参考。更多还原

【Abstract】 SEM plays a very important role in the observation and analysis of material morphology,structure and composition. It has the characteristics of large imaging depth, high resolution and strong three-dimensional sense. Taking Hitachi SU3500 SEM as an example, combined with years of maintenance and practice experience, this paper expounds that the maintenance of its best working condition needs to deal with the maintenance of hardware equipment, preparation of test samples and adjustment of working parameters of electron microscope. Through a detailed analysis of these three factors, some corresponding maintenance methods and improvement measures(such as filament model selection and installation, specific setting of working parameters, etc.) are put forward in practice, so as to extend the working life of the electron microscope and improve its performance, and provide a reference for other users.更多还原