【摘要】 选取ZnS和MgF₂两种材料设计了ZnS/MgF₂双层减反射膜，并利用TFCalc软件分析了膜层厚度、折射率以及光入射角对双层膜系有效反射率的影响.结果表明：ZnS和MgF₂的最佳物理厚度分别为67.86 nm和119.14 nm,此时达到最小有效反射率3.37%;在380～1 200 nm波长范围内，ZnS的厚度对有效反射率的影响比MgF₂大；MgF₂的折射率对有效反射率的影响比ZnS大；适当降低MgF₂折射率可以获得较低的有效反射率.更多还原

【Abstract】 In order to improve the photoelectric conversion efficiency of crystalline silicon solar cells, the ZnS/MgF₂ double-layer anti-reflection film was designed by choosing ZnS and MgF₂ materials. The effects of the thickness, refractive index and light incidence angle of each layer on the effective reflectivity of the double-layer film system were analyzed by TFCalc.The simulation results show that the optimal physical thickness of ZnS and MgF₂ is 67.86 nm and 119.14 nm, respectively, and the minimum effective reflectance is 3.37%.The effect of the thickness of ZnS on the effective reflectivity is greater than that of MgF₂ in the wavelength range from 380 nm to 1 200 nm. The effect of MgF₂ refractive index on effective reflectivity is greater than that of ZnS. Lower effective reflectivity can be obtained by appropriately decreasing the refractive index of MgF₂.更多还原