【摘要】 以玻璃基板平面度误差检测为应用场景，研发了一种差动光谱共焦式平面度误差测量系统。依据仪器设计原则和工程任务，完成了测量系统误差分析和精度设计，确定玻璃基板平面度误差测量系统测量原理和总体方案，并完成测量系统设计，包括机械结构、控制系统和系统软件等。在标准环境条件(温度20℃,相对湿度65%)下，分别以二级平板和玻璃基板为被测对象，开展系统结构和精度验证实验；平面度误差分别为10.41μm和4.20μm。测试结果表明，该系统能够准确地对玻璃基板平面度误差进行检测，且测量精度得到提高。更多还原

【Abstract】 Aiming at the lower accuracy and the integration of teaching and research for practice teaching devices in the major of measurement and control technology and instrumentation and taking the flatness error detection of glass substrate as a typical application scenario, a differential measurement system of flatness error is proposed based on spectral confocal technique. According to the designing principles and tasks of an instrument, the accuracy analysis of the system is carried out, and the measurement principle and the overall design scheme are decided. Based on those, all parts of the measurement system are fulfilled successfully. Experimental tests are performed with taking respectively a two-level flat plane and a glass substrate as the measured ones in a standard ambient condition. The flatness errors are respectively 10.41 μm and 4.20 μm. The results show that the designed measurement system is used to measure the flatness error correctly, and the accuracy can be improved better.更多还原