【摘要】 为解决利用紫外激光制备不同金属涂层超材料微槽结构的尺寸精度问题，对银、1060铝、黄铜和硬质合金四种不同金属表面进行标刻获得线槽微结构；然后分析不同激光参数在不同材料表面加工线宽和槽深微结构的影响；最后通过实验找出在特定线槽深度时四种材料线槽宽度的最小值及对应的激光加工参数．实验结果表明在一定范围内脉冲宽度、重复频率的减小和单位长度脉冲数目的增大会使线宽和槽深增大，由此拟合出线宽和槽深与脉冲宽度、重复频率、材料电阻率的变化方程．这可为制备高精度金属超材料表面微槽结构提供实验依据．更多还原

【Abstract】 In order to solve the dimensional accuracy problem of different metal coated metamaterial microgroove structures prepared by ultraviolet(UV) laser, the wire groove microstructure has been obtained by marking the four metal surfaces of silver, 1060 aluminum, brass and cemented carbide. Then, the paper analyzes the effect of different laser parameters on the microstructure of line width and groove depth machined on different material surfaces. Finally, the paper carries out experiments to find out the minimum value of the groove width of the four materials and the corresponding laser processing parameters at a specific groove depth. The experimental results show that the decrease of pulse width and repetition frequency, as well as the increase of the number of pulses per unit length will increase the line width and groove depth within certain limits. Thereout, the variation equations are fitted of line width and groove depth with pulse width, repetition frequency and material resistivity. This result provides experimental basis for preparing high-precision microgroove structures on the surface of metal metamaterials.更多还原