【摘要】 开发一种采用接触式测头与电容式位移传感器相结合的在位测量装置及非球面测量与补偿加工软件，进行C3604黄铜球面及非球面的单点金刚石超精密切削加工，并开展在位测量及补偿加工试验。补偿加工后，经在位测量系统测量，球面面形精度PV达到231.4 nm，非球面面形精度PV达到206.3 nm；与离线测量结果比对，结果分别相差3.0 nm和7.0 nm，验证了在位测量系统测量的精确性和补偿加工的有效性。更多还原

【Abstract】 An in-situ measurement device combining contact probe and capacitive displacement sensor is developed.An aspherical measurement and compensation machining software is also developed. The single point diamond ultra precision cutting experiments for C3604 brass spherical and aspherical surface are carried out. The in-situ measurement and compensation machining experiments are also carried out. After compensation machining, the spherical surface form accuracy PV reaches 231.4 nm, and the aspheric surface form accuracy PV reaches 206.3 nm. Compared with the off-line measurement results, the difference between the results is 3.0 nm, 7.0 nm respectively, the measuring accuracy of the in-situ measurement system and the validity of compensation machining are verified.更多还原