【摘要】 光学薄膜技术广泛应用于几乎所有的光学系统、光电系统和光电仪器。新型探测器的发展对1～3■m近红外波段附近的能量响应提出了滤波的要求。从电磁场理论和麦克斯韦方程出发，介绍了光学薄膜的设计理论，论述了带通滤光膜的设计方法。基于Optilayer软件，以氧化铝为基底，设计了一种工作波段为1.3～2.7■m的近红外带通滤光膜。考虑到镀膜材料的匹配性问题，选择硫化锌和氟化镱作为高、低折射率材料。采用长波通与短波通相结合的设计方法，并用Optilayer软件完成了膜系的计算和优化。在氧化铝基底双面镀制膜，用电子束蒸发和离子束辅助沉积的制备工艺完成了膜系镀制。用分光光度计对制备样品进行了透过率测试。结果表明，在1.3～2.7■m设计波段，样品的平均透过率大于95%,符合带通滤光膜的设计要求。更多还原

【Abstract】 Optical thin film technology has been widely used in almost all optical systems, photoelectric systems and photoelectric instruments. The development of new detectors puts forward filtering requirements for the energy response in the near-infrared 1--3 ■ m band. Starting from the electromagnetic field theory and Maxwell′s equations, the design theory of optical thin films is introduced, and the design method of band-pass filter films is discussed. Using Optilayer software, a band-pass filter film in the near-infrared band is designed with alumina as the base, and the working band is 1.3--2.7 ■ m. Considering the matching of coating materials, zinc sulfide and ytterbium fluoride are selected as high and low refractive index materials. The design method combining long wave pass and short wave pass is adopted, and the calculation and optimization of the film system are completed with Optilayer software. The film is coated on both sides of the alumina substrate, and the film system is coated by the preparation process of electron beam evaporation and ion beam-assisted deposition. The prepared samples are tested for transmittance with a spectrophotometer. The test results show that the average transmittance of the sample is greater than 95% in the design waveband of 1.3--2.7 ■ m, which meets the requirements of the design of the band-pass filter film.更多还原