【摘要】 超声振动辅助电火花（UVE）微孔加工作为一种特种复合加工技术，是提高难加工材料微孔加工性能的有效途径之一。在UVE微孔加工中，根据超声振动作用形式不同，可分为电极振动、工件振动和工作液振动3种微孔加工方式。电极振动的UVE微孔加工中，超声频率一般为20～40kHz，超声振幅为5μm左右，材料去除率可提高40%～60%，可加工深径比最大接近30的微孔。工件振动的UVE微孔加工中，超声频率大多小于30kHz，超声振幅小于10μm，材料去除率可提高40%左右，微孔锥度降低30%左右。工作液振动的UVE微孔加工中，超声频率一般大于40kHz，超声振幅大于5μm，材料去除率最大可提高33倍，孔壁粗糙度可达Ra0.2μm。对3种类型的UVE微孔加工的研究成果进行了总结与分析，探讨了3种类型的UVE微孔加工机理以及存在的问题，对比了3种振动类型的UVE微孔加工特点以及适用范围，并对UVE微孔加工发展趋势进行了展望。更多还原

【Abstract】 Ultrasonic vibration assisted electrical discharge(UVE), as a special composite machining technology,is one of the effective methods to improve the micro-holes machining performance of difficult-to-cut materials. In UVE micro-holes processing, according to the different forms of ultrasonic vibration, it can be divided into three modes:electrode vibration, workpiece vibration and dielectric vibration. In the UVE micro-hole processing of electrode vibration,the ultrasonic frequency is generally 20–40kHz, and the ultrasonic amplitude is about 5μm, which can improve the material removal rate by 40%–60%, and can machine the micro-hole with an aspect ratio of up to 30. In the UVE microhole processing of workpiece vibration, the ultrasonic frequency is mostly less than 30kHz and the ultrasonic amplitude is less than 10μm, and the material removal rate can be increased by about 40% and the micro-hole taper reduced by about 30%. In the UVE micro-hole processing of working fluid vibration, the ultrasonic frequency is generally greater than 40kHz, and the ultrasonic amplitude is greater than 5μm, which can increase the material removal rate by up to 33 times,and the hole wall roughness can reach Ra0.2μm. The research result of the three types of UVE micro-hole processing are summarized and analyzed, the three types of UVE micro-hole processing mechanisms and existing problems are discussed,and the characteristics and scope of application of the three types of UVE micro-hole processing are compared, and the development trends of UVE micro-hole processing were prospected.更多还原