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高性能大尺寸X射线多层膜反射元件研制进展

Development of high performance and large size X-ray multilayer reflective optics

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【作者】 黄秋实齐润泽张哲李文斌蒋励张云学庄野琪张众王占山

【Author】 HUANG Qiushi;QI Runze;ZHANG Zhe;LI Wenbin;JIANG Li;ZHANG Yunxue;ZHUANG Yeqi;ZHANG Zhong;WANG Zhanshan;Institute of Precision Optical Engineering,MOE Key Laboratory of Advanced Micro-Structured Materials,School of Physics Science and Engineering,Tongji University;

【通讯作者】 王占山;

【机构】 同济大学物理科学与工程学院先进微结构材料教育部重点实验室精密光学工程技术研究所

【摘要】 X射线多层膜是同步辐射与自由电子激光、天文观测、等离子体诊断等大科学装置和实验室分析仪器的重要光学元件,能高效率反射X射线并实现单色和偏振化等调控。本课题组在近二十年的工作中对X射线多层膜的设计、制备和表征方法开展了系统深入的研究,研制了一系列工作在软X射线和硬X射线不同波段的高性能多层膜,反射率达到国际先进水平;基于磁控溅射技术建立了大尺寸掠入射X射线多层膜的镀制平台,最大镀膜尺寸达1.2 m,均匀性优于0.5%(均方根值),制备的硬X射线多层膜反射镜成功应用在国内外大科学装置中;通过将多层膜与反射光栅相结合,创新发展了超高效率韧X射线多层膜光栅元件,相比传统单层膜光栅,该元件能将韧X射线衍射效率最高提升40倍。本文将简要介绍课题组在X射线多层膜元件领域的研究进展。

【Abstract】 X-ray multilayers are key optical elements in synchrotron radiation and free electron laser facilities,astronomical observations,plasma diagnostics,and lab-based analytical instruments. They can realize highly efficient reflection,monochromatization,and polarization of X-rays. Our group has been conducting systematic studies on the design,fabrication,and characterization of X-ray multilayers during the past 20 years. We have developed a series of high-performance multilayers with world-class level reflectivity at different wavelengths and have built the deposition platform for large size X-ray multilayers based on the magnetron sputtering technique. The largest deposition mirror could achieve a length of 1. 2 m. The fabricated,hard X-ray multilayer mirrors have been successfully applied in synchrotron radiation facilities both in China and abroad. Through the combination of multilayer and reflective gratings,innovative,ultrahigh efficiency,tender,X-ray multilayer grating optics have been developed. Compared with conventional single-layer gratings,a maximum efficiency improvement of 40 times could be achieved. This study will introduce the results and progress that were achieved by our group in X-ray multilayer elements.

【基金】 国家自然科学基金资助项目(No.12075170);上海市青年科技启明星计划项目(No.19QA1409200)
  • 【文献出处】 光学精密工程 ,Optics and Precision Engineering , 编辑部邮箱 ,2022年21期
  • 【分类号】TH74
  • 【下载频次】21
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