【摘要】 极紫外、X射线为微观物质认识、宏观空间探测提供了高精度的观测手段，但这类观测的实现需要大量高精度光学反射元件的支撑。由于极紫外、X射线在光学表面更易发生散射，其光学反射镜基底的精度需求和制作技术也明显区别于长波元件。近年来，同济大学精密光学工程技术研究所建立了极紫外、X射线反射元件基底的超精密加工与检测平台，研发了超光滑非球面的离子束修形技术，提出了基于泽尼克多项式的随机离轴旋转绝对检测方法，形成了极紫外、X射线光学用反射镜基底的高精度全流程研制技术，并将该技术成功地应用于国内和国际短波光学大科学装置中。本文综述了本课题组在极紫外、X射线用反射镜制作领域中的研究进展。更多还原

【Abstract】 High-precision extreme ultraviolet and X-ray observations for space exploration require the development of advanced micro materials for the numerous high-precision optical reflection elements used in such observations. Because short wavelengths are more prone to scattering on optical surfaces,the precision requirements and the fabrication techniques of short-wavelength optical components differ significantly from those of long-wavelength optical components. The Institute of Precision Optical Engineering(IPOE)at Tongji University has 20 years of research experience in this field. We have built a high-accuracy fabrication and measurement platform based on short-wavelength mirrors,developed an ion beam configuration of an ultra-smooth aspheric surface,proposed an absolute measurement method using random off-axis rotation based on Zernike polynomials,and formed a complete technology chain to develop aspheric reflector substrates. These optical components and systems have been successfully applied at several shortwavelength science facilities both in China and abroad. This study will briefly introduce the recent research progress on these optical aspheric reflectors at the IPOE.更多还原