【摘要】 为满足薄膜太阳能电池对Na源充足与稳定的需求,以钼酸钠和氧化钼粉为原料,采用放电等离子烧结技术（SPS）制备了Na掺杂MoO₃陶瓷靶材（Na-MoO₃）,研究了烧结温度、烧结助剂Al和Na掺杂含量（"含量"指摩尔分数）对Na-MoO₃靶材结构、组织、致密度以及Na回收率的影响。结果表明:在烧结助剂Al含量为1%、Na含量为3%、烧结温度为450℃的实验条件下,可以制备出致密度高（相对致密度98.2%）、钠回收率高（94.3%）的Na-MoO₃陶瓷靶材。随着掺杂含量的增加,Na-MoO₃靶材致密度和Na回收率降低。将含1%Al和3%Na的氧化钼陶瓷靶材通过磁控溅射工艺溅射成膜,所制备的Na-MoO₃薄膜结构致密,0.28%Na元素均匀弥散分布于薄膜中。更多还原

【Abstract】 In order to meet the requirements of the sufficient and stable Nasource for thin film solar cells, Na ion doped MoO₃ ceramic targets（Na-MoO₃） were prepared by spark plasma sintering（SPS） using sodium molybdate and molybdenum oxide powder as the raw materials. The effects of the sintering temperature, sintering agent Al and the content of the doped Na（mole fraction） on the structure, microstructure, density and Na recovery of Na-MoO₃ target were investigated. The results show that under the condition of 1% Al, 3% Na and 450 ℃ sintering temperature, the Na-MoO₃ ceramic target with the high density（relative density of 98.2%） and high sodium recovery（94.3%） can be successfully prepared. With the increase of doping content, the density and Na recovery of Na-MoO₃ target decreases. Using MoO₃ ceramic containing 3% Na as the sputtering target, the Na-MoO₃ thin films were prepared by magnetron sputtering process. The prepared Na-MoO₃ thin film has a compact structure and 0.28% Na is uniformly distributed in the film.更多还原